CoCrPtTa/Ti Perpendicular Media Deposited at High Sputtering Rate
نویسندگان
چکیده
CoCrPtTa/Ti bilayer thin films have been sputter deposited onto both glass and Al substrates under high sputtering rate in a manufacturing environment. From microstructure and magnetic property studies, it is found that Cr segregation and stacking fault density are the two major issues in obtaining high quality perpendicular media. (0002) texture orientation spread and lattice parameter remain almost constant within the variation range of the deposition parameters, though there is a small distinction between the media on glass and those on Al substrates.
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